Sweeping the lean angle can make improvements to film thickness uniformity and sidewall protection when also averting significant Vitality-reflected neutral species for critical processes.
IBSD takes put inside a high vacuum ecosystem, reducing noble gas inclusion from the deposited movie and strengthening the environmental balance from the coating.
Target rotation and carousel indexing Every have torque perception, blocking any approach difficulties as a result of slips or jams in rotation.
The dimensions, posture, and gear ratio of every planet are optimized to supply the absolute best feasible film thickness uniformity.
Our Reticle® ion beam sputter deposition programs are intended and engineered to build specific optical movies of the best purity, density, and steadiness.
If it’s off by even 50 percent a degree, it will eventually affect the morphology of these nanostructures noticeably.
Angstrom went to wonderful lengths to refine the tolerances of the lean angle, improving upon it from a variation of as much as a full diploma on non-Angstrom devices I’ve used to lower than 0.
Our exclusive design and style permits immediate or indirect checking of the variable angle phase, doing away with the necessity for tooling elements or maybe a witness glass changer. Find out more concerning the Optical Monitoring & Management package here.
IBSD processes can also make use of a secondary ion resource for substrate cleaning and energetic aid, substrate heating for reactive deposition, As well as in-situ optical monitoring or ellipsometry for important layer thickness termination.
The IBSD system generates a highly energetic flux of deposition substance, leading to films with enhanced density, hardness, and area roughness in comparison with All those deposited by evaporation processes.
The deposition ion supply is directed towards a fabric focus on which has been optimized in both equally sizing and place for that needed deposition geometry.
Self-aligned ion optics are configured specifically for the specified deposition specifications and geometry within your method.
Angstrom Engineering’s Reticle® units offer a switch-crucial Remedy for those wanting to notice any optical style and design into a high-general performance film.
Dynamic uniformity shaping is reached using a flux correction protect among the deposition source and the High-purity metal products substrate.
Thoughtful design of your ion beam concentrating optics confines the beam fully to the area from the focus on, eliminating any danger of contamination.